| Title |
An Assessment of Energy Consumption in Steam-Humidification- and Water-Spray-Humidification-Type Outdoor Air Conditioning Systems for Semiconductor Manufacturing Clean Rooms |
| Authors |
김기철(Ki-Cheol Kim) ; 송근수(Gen-Soo Song) ; 김형태(Hyung-Tae Kim) ; 유경훈(Kyung-Hoon Yoo) ; 신대건(Dae-Kun Shin) ; 박덕준(Dug-Jun Park) |
| DOI |
http://dx.doi.org/10.6110/KJACR.2013.25.2.055 |
| Keywords |
클린룸 ; 외기공조시스템 ; 연간 에너지 소비량 ; 증기가습 ; 수분무가습 Clean room ; Outdoor air conditioning system ; Annual energy consumption ; Steam humidification ; Water spray humidification |
| Abstract |
For a large-scale semiconductor manufacturing clean room, the energy consumed in an outdoor air conditioning system to heat, humidify, cool and dehumidify incoming outdoor air is very large. In particular, the energy requirement to humidify outdoor air in the winter season is generally known to be high. Recently, in order to overcome the high energy consumption nature of a steam generator in a conventional steam humidification type outdoor air conditioning system, an air washer is often introduced instead of the steam generator in the outdoor air conditioning system, which can be called a water spray humidification type outdoor air conditioning system. Therefore, the assessment and comparison of the annual energy consumed in the steam humidification type and the water spray humidification type outdoor air conditioning systems deserves to be examined in order to reduce the outdoor air conditioning load of a clean room. In the present study, a numerical analysis was conducted to obtain the annual electric power consumption of the two outdoor air conditioning systems. It was shown from the comparison of the numerical results that the water spray humidification type outdoor air conditioning system can reduce about 30% of annual electric power consumption of the steam humidification type outdoor air conditioning system. |