| Title |
Fabrication of Three-Dimensional Micro Optical and Fluidic System Using Dual Stage Nanostereolithography Process |
| Authors |
Tae Woo Lim ; Dong-Yol Yang |
| DOI |
http://dx.doi.org/10.6110/KJACR.2015.27.10.552 |
| Keywords |
펨토초레이저 ; 3차원 마이크로형상 ; 이중스테이지 ; 이광자흡수 광경화 Femtosecond laser ; 3D microstructure ; Dual Stage ; Two-photon polymerization |
| Abstract |
The nanostereolithography process using a femtosecond laser has been shown to have strong merits for the direct fabrication of 2D/3D micro structures. In addition, a femtosecond laser provides efficient tools for precise micromachining owing to the advantages of a small and feeble heat effect zone. In this paper, we report an effective fabrication process of 3D micro optical and fluidic devices using nanostereolithography process composed of a dual stage system. Process conditions for additive and subtractive fabrication are examined. The Piezo stage scanning system is used for 3D micro-fabrication in unit area of sub-mm scale, and the motor stage is employed in fabrication on the scale of several mm. The misalignment between the pizeo- and motor- stages is revised through rotational transformation of CAD data in the unit domain. Here, the effectiveness of the proposed process |