KJACR
Korean Journal of
Air-Conditioning and Refrigeration Engineering
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ISSN : 1229-6422 (Print)
ISSN : 2465-7611 (Online)
http://journal.auric.kr/kjacr
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Korean Journal of Air-Conditioning and Refrigeration Engineering
ISO Journal Title
Korean J. Air-Cond. Refrig. Eng.
Open Access, Monthly
Open Access
Monthly
ISSN : 1229-6422 (Print)
ISSN : 2465-7611 (Online)
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1993-05
(v.5 n.2)
설비공학논문집
1993-05
PDF
INFO
Title
Measurement of Particle Deposition Velocity toward a Horizontal Semiconductor Wafer Using a Wafer Surface Scanner
Authors
배귀남 ; 박승오 ; 이춘식 ; 명현국 ; 신흥태
Page
pp.130-140
ISSN
12251720