Mobile QR Code QR CODE : Korean Journal of Air-Conditioning and Refrigeration Engineering
Korean Journal of Air-Conditioning and Refrigeration Engineering

Korean Journal of Air-Conditioning and Refrigeration Engineering

ISO Journal TitleKorean J. Air-Cond. Refrig. Eng.
  • Open Access, Monthly
Open Access Monthly
  • ISSN : 1229-6422 (Print)
  • ISSN : 2465-7611 (Online)
Title Measurement of Particle Deposition Velocity Toward a Vertical Wafer Surface
Authors 배귀남 ; 이춘식 ; 박승오 ; 안강호
Page pp.521-527
ISSN 12251720