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The Transactions of the Korean Institute of Electrical Engineers

The Transactions of the Korean Institute of Electrical Engineers

ISO Journal TitleTrans. Korean. Inst. Elect. Eng.
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  4. 10.5370/KIEE.2022.71.2.395
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References

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J. H. Cha, K. S. Seo, S. W. Kim, H. J. Lee, Oct 2021, Two-dimensional fluid simulation of inductively coupeld N2/NH3/SiH4 discharge, J. Phys. D: Appl. Phys., Vol. 55, No. 3, pp. 035203Google Search
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