| Title |
Effects of CH4-based reaction gas ratio for synthesis of carbon nanowall |
| Authors |
권석훈(Seok-Hun Kwon) ; 강현일(Hyun-Il Kang) |
| DOI |
https://doi.org/10.5370/KIEEP.2019.68.2.112 |
| Keywords |
Carbon nanowall (CNW) ; Reaction gas ratio ; Growth properties ; plasma enhanced chemical vapor deposition |
| Abstract |
In this work, utilized carbon nanowall is promising material widely applied in electrochemistry due to its advantages that are wide surface and outstanding electrical properties. Typically, carbon nanowall is synthesized by metal catalyst free-based PECVD as simple synthesis process. But, it has high defect due to high reliance of c-radical and absence of metal catalyst. To reduce defect occurred during PECVD-based carbon nanowall synthesis, we worked by adjusting reaction gas ratio by CH4 gas. And then, the carbon nanowall synthesized by PECVD was analyzed though SEM, Raman spectra and HEMS. Upon inspection on carbon nanowall synthesized depend on reaction gas ratio, it was observed with electrical-structure variation without appearance variation. As a result, we presented signification of findings as well as optimal reaction gas ratio for carbon nanowall synthesis. |