| Title |
Development of Multi-Channel Laser Diode Control Board for Photo lithography Equipment |
| Authors |
이대종(Dae-Jong Lee) ; 최환용(Hwan-Yong Choi) ; 임재윤(Jae-Yoon Lim) ; 지평식(Pyeong-Shik Ji) |
| DOI |
https://doi.org/10.5370/KIEEP.2019.68.4.231 |
| Keywords |
Laser diode; Multi-channel control Board; Photo lithography equipment |
| Abstract |
Currently, mercury lamps are used as light sources in semiconductor and display photo processes. Mercury lamp light sources contain heavy metals, which are environmentally destructive and are entirely imported from Japan. In addition, mercury lamps need to be replaced 12 times a year for one month of service life, resulting in continuous replacement costs. In addition, due to the deterioration of the exposure machine, periodic maintenance is also required, and the environmental burden for waste disposal of the light source is high, and thus, the retrofit to other light sources needs improvement. Therefore, in this paper, we develop a multi-channel control board for photo lithography equipment using laser diode as a method to replace the existing mercury lamp. |