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The Transactions P of
the Korean Institute of Electrical Engineers
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Korean Journal of Air-Conditioning and Refrigeration Engineering
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2019-12
(Vol.68P No.04)
10.5370/KIEEP.2019.68.4.231
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REF
References
1
Jinho AHN, Sangsul LEE, 2011, Principles of Photolithography, Physics & High Technology, special edition, pp. 1-8
2
Harry J. Levinson, 2004, Principles of Lithography, 2nd ed
3
J. F. Ready, 2001, LIA Handbook of laser materials processing, Magnolia Publishing Inc., pp. 661-665
4
Bae-Kyu Lee, 2015, Multi-channel LD Driver designed for CTP (computer to plate), Journal of the Korea Institute of Information and Communication Engineering, Vol. 19, No. 3, pp. 667-673
5
2009, EUVL Projection on Samsung’s Device Roadmap, EUVL Symposium
6
2010, EUV into production with ASML’s NXE platform, EUV Symposium