| Title |
Design of High Speed and Torque Ripple Reduction of Motors for Semiconductor CVD Process |
| Authors |
최도현(Do-Hyeon Choi) ; 양인준(In-Jun Yang) ; 김원호(Won-Ho Kim) ; 정동훈(Dong-Hoon Jung) |
| DOI |
https://doi.org/10.5370/KIEEP.2022.71.4.255 |
| Keywords |
IPMSM; Semiconductor; FEA Model; CVD; Vacuum Pump Motor |
| Abstract |
This paper proposes a design method for reducing torque ripple and high speed IPMSM used in motors for semiconductor CVD process. IPMSM can utilize the reluctance torque through the difference in inductance between the d-axis and the q-axis, but has a disadvantage in terms of torque ripple. Accordingly, an improved model was designed to reduce torque ripple and simultaneously reduce eddy current loss by applying taper ring to the rotor. The voltage and current limiting sources and speed-torque curves were compared with the existing model, and the no-load and load performance were compared by operating speed. In addition, the web thickness of the improved model was secured through demagnetization analysis and mechanical stiffness analysis of permanent magnets, and the design feasibility of the improved model and the existing model was verified through the FEA analysis results. |