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2022-06
(Vol.71P No.02)
10.5370/KIEEP.2022.71.2.107
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REF
References
1
F. Khan, M. I Younis, 2022, RF MEMS electrostatically actuated tunable capacitors and their applications: a review, J. Micromech. Microeng., Vol. 32, pp. 1-19
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E. E. Moreira, J. Cabral, J. Gaspar, L. A. Rocha, 2016, Low-voltage, high-tuning range MEMS variable capacitor using closed-loop control, Procedia Engineering, Vol. 168, pp. 1551-1554
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J. Y. Park, Y. J. Yee, H. J. Nam, J. U. Bu, 2001, Micormachined RF MEMS tunable capacitors using piezoelectric actuators, IEEE MTT-S International Microwave Symposium Digest, pp. 2111-2114
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J. Lin, J. X. Zhu, M. Sonje, Y. Chang, Z. C. Feng, M. Almasri, 2012, Two-cavity MEMS variable capacitor for power harvesting, J. Micromech. Microeng., Vol. 22
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K. C. Lee, H. S. Hwang, T. Y. Lee, W. Y. Hur, J. T. Song, 2011, Effects of Sputtering Condition on Structural Properties of PZT Thin Films on LTCC Substrate by RF Magnetron Sputtering, J. KIEEME, Vol. 24, No. 4, pp. 297-302
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H. S. Hwang, J. T. Song, 2008, Dual Piezoelectric Actuation Bridge of In-Plane Polarized Lead Zirconate Titanate Film, Jpn. J. Appl. Phys., Vol. 47, pp. 6380-6382
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M. Lee, J. H. Kim, H. J. Koo, 2019, Dielectrophoresis for Control of Particle Transport: Theory, Electrode Designs and Applications, Korean Chem. Eng. Res., Vol. 57, No. 2, pp. 149-163
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Y. Liu, S. Zhang, A. Zeng, P. Yan, 2022., Finite Element Analysis and Polarization Test of IDEs Piezoelectric Actuator, Micromachines, Vol. 13, pp. 154
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D. Y. Cha, S. J. Lee, S. P. Chang, 2011, A Study on Energy Harvester with Cantilever Structure Using PZT Piezoelectric Material, J. KIEEME., Vol. 24, No. 5, pp. 416-421