| Title |
The Proposal of an Outdoor Air-Conditioning System for a Semiconductor Manufacturing Cleanroom and Analysis of Its Energy Savings |
| Authors |
Woo Hyun Jung ; Doo Sam Song |
| DOI |
https://doi.org/10.6110/KJACR.2023.35.4.163 |
| Keywords |
단열가습; 냉각수 폐열; 에너지 사용량; 외조기; 증기가습 Adiabatic Humidification; CoolingWater-WasteHeat; Energy Consumption; Outdoor Air Conditioner; Steam Humidification |
| Abstract |
The purpose of this study is to propose an outdoor air conditioner configuration that combines adiabatic humidification and cooling water waste heat and review the potential for reduction in annual energy savings of outdoor air conditioners in semiconductor cleanrooms. Case 1 was an outdoor air conditioner that combined steam humidification with adiabatic humidification. Case 2 removed the steam humidification and applied only the adiabatic humidification. Case 3 was an outdoor air conditioner designed under the condition that steam humidification was eliminated, adiabatic humidification was applied in two stages, and the cooling water waste heat source supplied to the heating coil was used instead of the steam heat source. As a result of the analysis, in case of Case 2, energy consumption was reduced by about 11.3% compared to Case 1, and in case of Case 3, it was confirmed that about 24.6% of energy saving was possible as compared to Case 1. It was confirmed that a lot of energy used by the outdoor air conditioner can be saved by configuring the adiabatic humidification and the outdoor air conditioner using the waste heat of the cooling water. |