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The Journal of Semiconductor Technology and Science (JSTS) is an international, peer-reviewed, and open-access journal that is published bimonthly.
- Scope: semiconductor processes, devices, circuits, and MEMS.
- Editor-in-Chief: Prof. Woo Young Choi (ECE, Seoul National University)
- Indexed within Science Citation Index Expanded (SCIE), SCOPUS, Korea Citation Index (KCI), and other databases.

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Title Coplanar Waveguide Sensor for Dimethyl Methyl Phosphonate (DMMP) Vapor Detection at Microwave Frequencies
Authors (Zabdiel Brito-Brito) ; (Jorge A. I. Araujo) ; (Sung-min Sim) ; (Marcos T. de Melo) ; (Ignacio Llamas-Garro) ; (Jung-Mu Kim)
DOI https://doi.org/10.5573/JSTS.2025.25.6.654
Page pp.654-661
ISSN 1598-1657
Keywords CPW; dimethyl methyl phosphonate (DMMP); microwave; palladium; microwave sensor
Abstract The development of a palladium-based Coplanar Waveguide (CPW) microwave sensor for detecting Dimethyl methyl phosphonate (DMMP) vapor is designed, fabricated, and tested in this paper. The sensor is fabricated using a thin palladium layer on a planar quartz substrate. Microwave transmission loss variations were used to identify the presence of DMMP vapor in a controlled environment. The presence of 400 parts per million (ppm) DMMP caused detectable changes in the transmission (S21) and admittance (Y11) parameters.