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The Journal of Semiconductor Technology and Science (JSTS) is an international, peer-reviewed, and open-access journal that is published bimonthly.
- Scope: semiconductor processes, devices, circuits, and MEMS.
- Editor-in-Chief: Prof. Woo Young Choi (ECE, Seoul National University)
- Indexed within Science Citation Index Expanded (SCIE), SCOPUS, Korea Citation Index (KCI), and other databases.

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Journal Archive

2025-10

P.469

Sample-Efficient Reinforcement Learning for Analog Circuit Optimization with Intrinsic Reward

(SuMin Oh) ; (HyunJin Kim)
https://doi.org/10.5573/JSTS.2025.25.5.469
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P.476

Ab-initio Thermodynamic Study of Vapor Pressure of Mo(CO)6 and Its Initial Surface Reaction on SiO2 (111) Surface

(Ha-Neul Kim) ; (Saukinta Thapa) ; (Sun-Hye Kim) ; (Na-Young Lee) ; (Jong-Yoon Kim) ; (Yeong-Cheol Kim)
https://doi.org/10.5573/JSTS.2025.25.5.476
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P.484

A Development of a Robust Computer Vision-based Framework for Metrology and Inspection of Stacked Die in HBM Process

(Hye Yun Seong) ; (Sung Hyun Yoon) ; (Young Hoon Lee) ; (Gwang Min Yoon)
https://doi.org/10.5573/JSTS.2025.25.5.484
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P.490

TEOS SiO2 Film Deposition Optimization for Increasing Capability and Securing TSV Robustness of HBM

(Intae Whoang) ; (Byung Yoon Lim) ; (Kijun Bang) ; (Sang Un Lee)
https://doi.org/10.5573/JSTS.2025.25.5.490
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P.496

Performance Enhancement of THz Detector Based on Trantenna with Shallow Trench Isolation in 28-nm CMOS Technology

(Yoo Bin Song) ; (Min Woo Ryu) ; (E-San Jang) ; (Kyung Rok Kim)
https://doi.org/10.5573/JSTS.2025.25.5.496
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P.502

Scalability of 28-nm Ternary CMOS Technology Using Halo Profile for Low-leakage and High-density SRAM

(Woo-Seok Kim) ; (Kwan Yong Lee) ; (Sang Hun Yeo) ; (In Jun Jang) ; (Young-Eun Choi) ; (Min Woo Ryu) ; (Kyung Rok Kim)
https://doi.org/10.5573/JSTS.2025.25.5.502
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P.509

Enhanced HMDSO Resistance in CeO2-rGO/Pd/ZnO Gas Sensor

(Soyhan) ; (Jeong Min Baik) ; (Yunsik Lee)
https://doi.org/10.5573/JSTS.2025.25.5.509
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P.517

An Automatic Place-and-route Method for CDAC Arrays with Parasitic Effect Suppression

(Wenjie Yang) ; (Yanning Chen) ; (Dong Zhang) ; (Fang Liu) ; (Yang Zhao) ; (Fang Ni) ; (SongChao Zhu) ; (Xiangyu Meng)
https://doi.org/10.5573/JSTS.2025.25.5.517
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P.530

HLS-based Hardware/Software Co-design of ML-KEM Post-quantum Cryptosystem for Real-time Video Encryption

(Kyungkyun Kang) ; (Seulbee Yang) ; (Giang Truong Le) ; (Hanho Lee)
https://doi.org/10.5573/JSTS.2025.25.5.530
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P.542

A 32-Channel 8-bit DAC-based Driver IC with Channel Uniformity Optimization for Optical Phased Arrays

(Kihun Kim) ; (Woo-Young Choi)
https://doi.org/10.5573/JSTS.2025.25.5.542
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