| Title |
An Electrical Variable Capacitor Circuit for Fast Semiconductor Process |
| Authors |
Hongmin Kim ; Heewon Choi ; Cheonghyeon Hwang ; Yongsug Suh ; Cheon-Yong Lim |
| DOI |
https://doi.org/10.6113/TKPE.2026.31.3.273 |
| ISSN |
1229-2214(pISSN), 2288-6281(eISSN) |
| Keywords |
EVC(Electrical Variable Capacitor); Impedance matching; Capacitance adjustment |