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Title An Electrical Variable Capacitor Circuit for Fast Semiconductor Process
Authors Hongmin Kim ; Heewon Choi ; Cheonghyeon Hwang ; Yongsug Suh ; Cheon-Yong Lim
DOI https://doi.org/10.6113/TKPE.2026.31.3.273
Page pp.273-279
ISSN 1229-2214(pISSN), 2288-6281(eISSN)
Keywords EVC(Electrical Variable Capacitor); Impedance matching; Capacitance adjustment