| Title |
An Electrical Variable Capacitor Circuit for Fast Semiconductor Process |
| Authors |
Hongmin Kim ; Heewon Choi ; Cheonghyeon Hwang ; Yongsug Suh ; Cheon-Yong Lim |
| DOI |
https://doi.org/10.6113/TKPE.2026.31.3.273 |
| ISSN |
1229-2214(pISSN), 2288-6281(eISSN) |
| Keywords |
EVC(Electrical Variable Capacitor); Impedance matching; Capacitance adjustment |
| Abstract |
With the increased demand for high-performance semiconductors nowadays, electrical variable capacitor (EVC) circuits have attracted growing attention for advanced semiconductor processes. However, the conventional EVC circuit requires a large filter inductor Lf, which hinders fast capacitance adjustment. A new EVC circuit with fast capacitance adjustment speed is proposed to address this issue. The proposed EVC circuit enables the use of a smaller Lf by rearranging the switching diode DSW and the variable capacitor Cvar and adding a shunt inductor LS, thereby achieving faster capacitance adjustment and reduced volume. A 300 W prototype was tested to validate the feasibility of the proposed EVC circuit. |