| Title |
Experimental Study on Characteristics of Dust Generation of Clean Robot and Airflow around Clean Robot |
| Abstract |
In this paper, a medium size-transporting-multi arm joint-type clean robot using the clean method of exhausting the inside air of robot arm and reduction of the gap at the joint of robot arm was investigated on followings.1)The Degree of improvement on a robot arm joint before and after using the clean method is compared by measuring the particle concentration.2)The range of dust diffusion and the characteristics of airflow around a robot is investigated by particle concentration, air velocity, turblent intensity and visualization of airflow in case of a robot working.3)The maintenance condition of cleanliness in the Clean Room is investigated in case of using the clean method at the joint of a robot.From the result of the experiments, the following conclusions are available.1)Total amount of dust generation over the particle size 0.3 m is decreased sharply by using the clean method at the robot arm joint.2)The degree of cleanliness of the area where the robot adapted the clean method meets with Class 10for the particle size 0.3 m.3)It is necessary to study further on the shape of a robot to avoid the inflow of dust from a surrounding area by the turblent airflow. |