| Title |
Experimental Study on Characteristics of Airflow in Unidirectional Flow Clean Room |
| Abstract |
In this paper the deflected airstream phenomenon were investigated with the flow visualization techniques and the measurement of air velocity in the exhaust system with the cross outlet of the Unidirectional Flow Clean Room.First, the distribution of airstream in the whole room was investigated with the different airflow resistance of the floor, secondly it was attempted to seek the displacement of streamline obtained by the distribution of airflow rate, and last the possibility of the deflected airstream control was investigated. So it was tried to make clear the relation between the distribution of airflow rate and the deflection of airstream in case of the different airflow resistance of the floor. |