| Title |
A Study on Characteristics of Exhaust Air for Energy Saving in Cleanroom |
| Abstract |
The aim of this study is to investigate the exhaust heat possibility of recovery and to suggest the energy saving method related to it. The possibility is evaluated in terms of the heat characteristics of exhaust air and the softy against pollution of airborne particle and gases in cleanroom. The result is that the Quality of general and heat exhaust air is a similar level to that of outdoor air. Addtionally, the temperature and humidity fluctuation of general and heat exhaust air is stabilized. Therefore, the reuse of general and heat exhaust air is estimated to be a possible heat source. |