| Title |
Development and Performance Verification of Sub-micron Particle Visualization System for the Industrial Clean Room |
| Authors |
Kim Yong-Shik ; Lee Eun-Tack ; Yang Gi-Young |
| Keywords |
Sub-micron Particle Visualization System ; Development ; Performance Verification ; Industrial Clean Room |
| Abstract |
The purpose of this study was to develope and performance verification of sub-micron particle visualization system for the industrial clean room. The sub-micron particle visualization system was developed by using pulse YAG laser, CCD camera, Image intensifier, tilt lens, traverse tools and etc. Laser-camera synchronization schedule was proposed to verify the acquired sub-micron particle visualization picture. Verification tests were executed in the severly controlled clean room, vacant space of real industrial clean room, and then process line of industrial clean room which was under construction. As a result, 0.144㎛ diameter sub-micron particle was visualized for the first time in a realistic clean room condition. And the sub-micron particle visualization system was improved and enhanced to be used as a major measurement tool in the construction process of industrial clean rooms. |