| Title |
An Experimental Study on the Changes of Air Flow and Cleanliness in the Vertical Laminar Flow Type CLEAN ROOM |
| Abstract |
In order to establish the fundamental theories of Cleam Room, the particle concentrations complying with the changes of air velocity are measured in an experimental Clean Room, and it's qualities are understood in this study. The laminar air flow is maintained well, purifying times are sought in order to maintain the degree of cleanliness in class 100 and in class 10. Also, the produced quantities of particles are measured, complying with 12stages of assumed working activities and 4types of garments. |