| Title |
Characteristics of Thermal Load for HVAC System in Cleanroom for Semiconductor Manufacturing |
| Abstract |
At semiconductor manufacturing facilities, its energy consumption is reaching considerable level becasue of its strict environmental requirements and thermal load for HVAC system as some ten times much as that of common buildings. The energy conservation is very important in semiconductor manufacturing cleanroom. On this study, the environmental conditions and the characteristics of thermal load classified by process and the type of load were investigated, compared and analyzed in semiconductor manufacturing cleanrooms around the suburb of Seoul. The process are classified into fabrication, assembly and test process and the types of load intooutdoor air ventilation, internal heat sources(heat generated from machines, lighting equipment and human body etc.), the power of a blower and heat transmission of wall.This study presents that the cooling load manufacturing process needs ten to twenty times, and that of assembly and test process needs about four of five times in comparison with that of a common building. |