| Title |
An Experimental Study on the Air Distribution in a Vertical Larminar Flow Type Clean Room |
| Authors |
오병칠 ; 이영재 ; 현승보 ; 김광영 ; 이건영 |
| Abstract |
In a vertical laminar flow type clean room, it is most important factor to form a uniform air distribution in order to maintain the cleanliness. The purpose of this study is to obtain the database for performance improvement in view point of air flow control. In order to understand the air distribution, air velocity measurement, visualization and suspended particle generation are experimented.The result of this study are as follows;1) In process area, air velocity of wall-side is less fluctuant than that of eyelid-side.2) There is an eyelid and the larger the eyelid is, the more air distribution is likely to be maintained at larminar flow. |