| Title |
A study on the Characteristics of the Radio - Frequency Induction Discharge Plasma |
| Abstract |
Electron temperature and electron density were measured in a radio-frequency inductively coupled plasma (RFICP) using a Langmuir probe method. Measurement was conducted in an argon discharge for pressures from 10 mTorr to 40 mTorr input rf power from 100 W to 600 W. Spatial distribution electron temperature and electron density were measured for discharge with same aspect ratio (R/L=2). Electron temperature and electron density were discovered depending on both pressure and power. Electron density was increased with increasing input power, but saturated at 450 W. Electron density was increased with increasing pressure. Radial distribution of the electron density was peaked at the position which was a little moved from center toward quartz window. Normal distribution of the electron density was peaked in the center between quartz plate and substrate. The above results could contribute to understand the Mechanism of Radio-Frequency Inductively Discharge Plasma. |