| Title |
Theoretical Analysis and Design of the Low - Energy Large - Aperture Electron Beam Generator |
| Abstract |
We have established a pulsed low-energy large-aperture electron beam(LELAEB) generation system with an energy of 200[keV], current of 1[A], pulse repetition rate of 200[Hz], and several tens of ㎲ pulse width. The system is characterized by a cold cathode that is simpler than the hot cathode. Electron beam does not need to be scanned over target objects because of large beam aperture of 300[㎠]. Electron source is secondary electrons that are generated when the ions from the glow discharge collide on the cathode surface. In this paper, We report about the design and manufacture of LELAEB generation system based on the theoretical analysis in order to study possibility of increasing the efficiency of LELAEB accelerator. We also report on the possibility of large aperture beam current generation and the current density uniformity based on the experimental results. |