| Title |
The Analysis of Nitrogen Plasma Using One-dimensional Self-consistent RF Fluid-Model |
| Authors |
Jang-Seop Lim ; Sun-Yule So |
| Keywords |
NP ; 용량결합형 플라즈마 ; SG법 Nitrogen Plasma ; CCP ; Scharfetter and Gummol"s Mothod |
| Abstract |
N₂ has been one of the most useful gases in industrial application, for example, plasma ashing, surface cleaning and decomposition of pollution gases. In order to clarify N₂ plasma properties and increase practical applications, many experimental and theoretical nvestigations have been carried out until now on. In this paper, we examined the characteristics of N₂ RF plasmas using one-dimensional fluid model. N₂ plasmas showed a double-layer structure in both sheath regions as the power source voltage becomes higher. Generally, a double-layer structure should be showed in electro-negative plasmas, but not in electro-postive plasmas such as N₂ discharge. However, most electrons in N₂ plasmas lost their energy by many excitation reactions in the near of both electrodes where electron collisions were actively executed and such continuous reactions during an RF period made this structure strong with increase of the power source voltage. The dependence of N₂ plasma properties on pressure was also discussed. |