Title |
The Diameter Control for improved performance of the Crystal Grower |
Authors |
Suk-Won Lee ; Jong-Sik Park ; Jin LeeChin-Woo Yi |
Keywords |
Crystal Grower ; automatic diameter control ; time-delay ; steady-state error |
Abstract |
In this paper the automatic diameter control system of the CZ-150 Crystal Grower is proposed in order to achieve a good performance for the industry applications in MEMC Korea. The effectiveness of the design parameters is verified by means of the computer simulations and the proposed controllers showed the better performance than the conventional PD controllers which always have steady-state errors. |