| Title |
Study on RF Plasma Modeling Between Unequal-Sized Electrodes UsingOne-dimensional Fluid Method |
| Authors |
Sun-Yule So ; Jang-Seop Lim |
| Keywords |
RF(Radio Frequency) Plasmas ; Fluid Models ; Plasma Space ; Electric Potential |
| Abstract |
In computational study on RF(Radio Frequency) plasmas, a 1D fluid models with an advantage of a short computational time are often adopted. However, in order to obtain realistic calculation results under a typical chamber geometry with unequal-sized electrodes, modeling of the plasma space is an issue to be investigated. In this paper, it is focused on that how much a 1D model can approximate a 2D model. 1D fluid models with unequal-sized electrodes, which have spherical and frustum geometry systems, were developed and their results were compared with those of 2D model with Gaseous Electronic Conference cell structure. Behavior of N₂ RF plasmas has been simulated using 1D and 2D fluid models and a technique to take account of unequal-sized electrodes in a 1D fluid models has been examined. Features of the plasma density and the electric potential were discussed as characteristic quantities representing the asymmetry of the chamber geometry. |