| Title |
Modeling of Two-dimensional Self-consistent RF Plasmas on Discharge Chamber Structures |
| Authors |
Sun-Yule So ; Jang-Seop Lim ; Chel-Woon Kim |
| Keywords |
fluid model ; RF plasmas ; 2D modelling |
| Abstract |
Plasma researches using parallel-plate electrodes are widely used in semiconductor application, such as etching and thin film deposition. Therefore, a quantitative understanding and control of plasma behavior are becoming increasingly necessary because their important applications and simulation techniques have been actively carried out in order to solve such problems above. In this paper, we developed a two-dimensional(2D) self-consistent fluid model, because 2D models can deal with real reactor geometries. The fluid model is based on particle continuity equations for taking account of an electrode system in a cylindrical geometry. An pure Ar gas was used at 500[mTorr] and radio-frequency (13.56[MHz]). Four models were simulated under the different electrode geometries which have chamber widths of 5.25, 6.0, 8.0, and 10.0[cm] and we compared their results with each other. Plasma uniformity and a dc self-bias voltage were also discussed. |