| Title |
Modeling of Carbon Plume in PLAD Method Assisted by Ar Plasmas |
| Authors |
Sun-Yule So ; Jang-Seop Lim |
| Keywords |
laser ablation ; carbon plume modelling ; Ar plasmas |
| Abstract |
A plused laser ablation deposition(PLAD) technique has been used for producing fine particle as well as thin film at relatively low substrate temperatures. However, in order to manufacture and evaluate such materials in detail, motions of plume particles generated by laser ablation have to be understood and interactions between the particles by ablation and gas plasma have to be clarified. Therefore, this paper was focused on the understanding of plume motion in laser ablation assisted by Ar plasmas at 100[mTorr]. One-dimensional hybrid model consisting of fluid and particle models was developed and three kinds of plume particles which are carbon atom(C), ion(C+) and electron were considered in the calculation of particle method. It was obtained that ablated C+ was electrically captured in Ar plasmas by strong electric field(E). The difference between motions of the ablated electrons and C+ made E strong and the collisional processes active. The energies of plume particles were investigated on a substrate surface. In addition, the plume motion in Ar gas was also calculated and discussed. |