| Title |
Capacitively Coupled Radio Frequency Discharge System for Excitation of Gas Laser |
| Keywords |
ccrf-discharge ; gas laser ; rf-electrode ; matching circuit |
| Abstract |
The ccrf-discharge has in comparison with the hollow-cathode discharge and DC-discharge some advantages: Simple design of the tube and homogeneous plasma. The ccrf-discharge was researched with the goal, to use on the excitation of the gas laser. In this work a rf-exciting system was planned and developed. With it a homogeneous discharge was produced in the cw operation. To supply the rf-power with the frequency 13.56[㎒] effectively in the discharge, laser tube were used with inner diameter of 5[㎜] and the specially developed rf-electrodes. A matching circuit was composed also. Thereby the impedance of the discharge tube was adjusted to the 50[Ω] output resistance of the rf-source. |