| Title |
RF Power Conversional System for Environment-friendly Ferrite Core Inductively Coupled Plasma Generator |
| Authors |
Joung-Ho Lee ; Dae-Kyu Choi ; Soo-Seok Kim ; Byuong-Kuk Lee ; Chung-Yeun Won |
| Keywords |
Remote Plasma System ; RF power ; Plasma ; HB PWM Inverter |
| Abstract |
This paper is a study about a proper method of plasma generation to cleaning method and a high frequency power equipment circuit to generation of plasma that used cleaning of chamber for TFT-LCD PECVD. The high density plasma required for cleaning causes a possibility of high density plasma more than 1×10¹¹[EA/㎤]. It apply a ferrite core of ferromagnetic body to a existing ICP form. In case of power transfer equipment on 400[㎑] high frequency to generation of plasma, it makes certain a stable switching operation in condition of plasma through using a inverter form for general purpose HB. And it demonstrates the performance of power transfer equipment using methods of measurement which use a transformer of series combination the density of plasma and the rate of dissolution of NF₃ in condition of Ar and NF₃. |