| Title |
Development of Performance Evaluation System for the High Speed EFEM |
| Authors |
Jeong-Hwan Cho ; Hee-Jung Roh |
| Keywords |
EFEM ; WTO/TBT ; PL ; Evaluation System |
| Abstract |
This paper suggests the new performance evaluation system which is suitable for high speed EFEM(Equipment Front End Module) device using a semiconductor process. An EFEM consisting of multi-joint robots is the mainstay of semiconductor automation, shuffling silicon wafers or quartz photo-masks between ultra-clean storage carriers and a variety of processing, measurement and testing systems. The theoretical and experimental studies for the development of performance evaluation system have been carried out. The presented results from the above investigation show considerably developed performance evaluation system for the high speed EFEM. Especially, it is efficient for prepareing the WTO/TBT(Technical Barriers to Trade) Agreement and the PL(Product Liability) law. |