| Title |
Decomposition Characteristics of Perfluorocompounds(PFCs) Gas through Gliding Arc Plasma with Hydrogen Gas |
| Authors |
Chang-Ho Song ; Dong-Wha Park ; Paik-Kyun Shin |
| DOI |
http://dx.doi.org/10.5207/JIEIE.2011.25.4.065 |
| Keywords |
Gliding Arc Plasma ; PFCs Gas Decomposition ; Gas Discharge |
| Abstract |
Perfluorocompounds (PFCs) gases were decomposed by gliding arc plasma generated by AC pulse power. N₂ gas of 10 LPM flow rate and H₂ gas of 0.5 LPM were introduced into the gliding arc plasma generated between a pair of electrodes with SUS 303 material, and the PFCs gases were injected in the plasma and thereby were decomposed. The PFCs gas-decomposition-characteristics through the gliding arc plasma were analyzed by FT-IR, where pure N₂ and H₂-added N₂ environment were used to generate the gliding arc plasma. The PFCs gas-decomposition-properties were changed by electric power for gliding arc plasma generation and the H₂ gas addition was effective to enhance the PFCs decomposition rate. |