| Title |
A Study on the Optical Emission Spectroscopy of the RF Inductive Plasma Process |
| Authors |
Mun-Gug Jang ; Sang-Bo Han ; Sang-Hyun Park |
| DOI |
http://dx.doi.org/10.5207/JIEIE.2011.25.11.103 |
| Keywords |
Hydrogen ; Methane ; Optical Emission Spectroscopy ; RF Inductive Plasma Process |
| Abstract |
This paper is tried to analysis the optical emission spectroscopy related to the position of inductive load coil and flow rates of methane and oxygen in the RF inductive plasma process. According to the position of load coil, peak of Hα, Hβ, and CH were appeared strongly at the middle position of the coil and it decreased both direction. The electron temperature was approximately 0.9[eV] at that position. Emission intensities of Hα, Hβ, and CH increased linearly by increasing input power. In addition, intensities of Hα and Hβ increased by increasing the flow rate of oxygen. It might be ascribed that the oxygen species were bonded with Cn Hmby suppressing the combination with hydrogen atoms. Consequently, the optimal position of the inductive coil is decided to the intermediate position between 4th and 5th turns, the wanted carbon thin-film is possible to deposit by controlling flow rates of methane and oxygen. |