JIEIE - Journal of the Korean Institute of Illuminating and Electrical Installation Engineers

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Journal of the Korean Institute of Illuminating and Electrical Installation Engineers

ISO Journal TitleJ Korean Inst. IIIum. Electr. Install. Eng.

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Title	Surface characteristics of Molybdenum Oxide Films Prepared by Oxidation Thermal Treatment Method
Authors	Sang-Gon Kim ; Youl-Moon Sung
DOI	http://dx.doi.org/10.5207/JIEIE.2014.28.3.057
Page	pp.57-62
ISSN	1225-1135
Keywords	MoOx ; Heat-Treatment ; Thin Film ; XRD ; Raman Spectroscopy ; Arrester
Abstract	In this work, molybdenum oxide films were fabricated by heat-treatment method. Fundamental surface characteristics of molybdenum oxide films were investigated using XRD and Raman spectroscopy. From the results, the optimum MoOx films could be obtained under the conditions of thermal treatment temperature of 550℃, oxidation time of 30 minutes and oxygen flow rate of 250sccm. The thermal treatment method offers a simple and effective route for the synthesis of uniform MoO3 films.

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