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Title The Fabrication of Floating Gate CMUT with Multi Cantilevers and Its Failure Analysis
Authors (Jiajun Liu) ; (Benxian Peng) ; (Fengqi Yu)
DOI https://doi.org/10.5573/JSTS.2021.21.1.021
Page pp.21-28
ISSN 1598-1657
Keywords Manipulator; CMUT; CMOS-MEMS; failure analysis
Abstract In order to realize soft grasp of robot manipulator, distance sensors need to be installed in the robotic fingers. CMUT (Capacitive Micro-machined Ultrasonic Transducer), which owns advantages of extra small size and excellent dielectric impedance matching, meets the demand very well. However there are some difficulties in design and fabrication of a CMUT device. In this paper we propose a novel CMUT design technique based on the integration of standard 0.18 um CMOS process and MEMS process. The design and post processing of CMUT is explained in detail. The fabricated CMUT is tested. It is found that the signal is not detected from some devices. Therefore, the failure analysis of CMUT is carried out in some aspects. Finally, fatigue failure is determined as the cause of the failure.