Cohen B., Hessels A., Kelly A., Chen L., Larson E., 2019, Impact of Exposures and Outbreaks on Staff Nurse and Infection Preventionist Workload, Am. J. Infect. Control, Vol. 47, No. 6, pp. s7

Liu B., Wang L., Liu M., 2019, Lifelong federated reinforcement learning: a learning architecture for navigation in cloud robotic systems, IEEE Robot. Autom. Lett., Vol. 4, No. 4, pp. 4555-4562

Kiihamaki J., Dekker J., Pekko P., 2004, ‘Plug-up’—a new concept for fabricating SOI MEMS devices, Microsyst. Technol., Vol. 10, No. 5, pp. 346-350

Savoia A. S., Caliano G., Pappalardo M., 2012, A CMUT probe for medical ultrasonography: From microfabrication to system integration, IEEE Trans. Ultrason. Ferroelectr. Freq. Control, Vol. 59, No. 6, pp. 1127-1138

Khanghah M. M., Sadeghipour K. D., 2014, A 0.5 V offset cancelled latch comparator in standard 0.18 um CMOS process, Analog Integr. Circuits Signal Process., Vol. 79, No. 1

Zhang R., Ren Z., Yu S., 2008, Loss-Reduction in Flexibly Vertical Coupled Ring Lasers Through Asymmetric Double Shallow Ridge and ICP / ICP Cascade Etching, Vol. 20, No. 22, pp. 1821-1823

Zhang Y., Zhu Q. S., Itoh T., Maeda R., Toda \A., 2013, High-resolution wet etching technology of thick electroless nickel alloy film for MEMS devices and packaging, Proc.2013 14th Int. Conf. Electron. Packag. Technol. ICEPT 2013, pp. 396-399

Arora S., Arora A., George P. J., 2012, Design of MEMS based microcantilever using comsol multihysics, Int. J. Appl. Eng. Res., Vol. 7, No. 11, pp. 1-3

Degertekin F. L., 2013, Harmonic cmut devices and fabrication methods., J. Acoust. Soc. Am., Vol. 130, No. 3, pp. 1781

Zhou W., Xu P., 2013, Theoretical investigation on the dynamic performance of CMUT for design optimization, Acta Mech. Solida Sin., No. 1, pp. 99-110