| Title |
Effects of Trapezoidal Fin Shape on Performance of Negative-capacitance FinFETs |
| Authors |
(Mengjie Zhao) ; (Weifeng Lu) ; (Ziqiang Xie) ; (Mengxue Guo) ; (Mi Lin) |
| DOI |
https://doi.org/10.5573/JSTS.2022.22.5.283 |
| Keywords |
Negative-capacitance effect; FinFET; fin shape variation; trapezoidal FinFET |
| Abstract |
In this study, a negative-capacitance fin field effect transistor (NC-FinFET) with a varying trapezoidal fin shape is proposed. The effects of varying the width of the top fin on the performance of the trapezoidal NC-FinFET with different ferroelectric layer thicknesses are investigated in detail. Using the technology computer-aided design simulation, it was determined that the trapezoidal NC-FinFET has lower on- and off-state currents and a higher switching current ratio, as well as a higher threshold voltage, than a traditional rectangular NC-FinFET. Thus, the device demonstrates an improved subthreshold swing and drain-induced barrier lowering. Unlike a conventional trapezoidal FinFET, the variations in the parameter performance for an NC-FinFET exhibit non-uniform trends. This study provides a predictive estimation for trapezoidal fin-induced variations in an NC-FinFET at the early design stage. |