Gebel T., Rebohle L., Fendler R., Hentsch W., Skorupa W., Voelskow M., Anwand W.,
Yankov R. A., Oct. 10-13, 2006, Millisecond annealing with flashlamps : Tool and process
challenges, Proc 14th International Conference on Advanced Thermal Processing of Semiconductors
RTP2006, Kyoto, Japan, pp. 47-55