Tae-Bin Kim, et al., “Design and control of 3kW plasma power supply,” in Proceedings of KIIEE Annual Conference, pp. 105-105, 2021.

Ga-In Kim, et al., “Design and control technique of multi-jet plasma power supply,” in Proceedings of KIIEE Annual Conference, p. 688, 2021.

Bongwoo Kwak and Jonghoon Kim, “A study on hybrid control technique for power supply system for plasma generation of flexible electrode,” Journal of Korean Institute of Intelligent Systems, vol. 29, no. 6, pp. 494-500, 2019.

Young-Min Kwon, Min-Wook Hwang, and Sungwoo Bae, “Design of variable power supply and experimental setup for analyzing flow characteristics of SD(sliding discharge) plasma actuator,” Journal of the Korean Institute of Illuminating and Electrical Installation Engineers, vol. 38, no. 3, pp. 227-232, 2024.

Woo-Cheol Lee and Taeck-Ki Lee, “The study on reactor parameters of atmosphere plasma power supply,” Journal of the Korean Institute of Illuminating and Electrical Installation Engineers, vol. 26, no. 6, pp. 59-65, 2012.

P. J. Kelly and R. D. Arnell, “Magnetron sputtering: a review of recent developments and applications,” Vaccum, vol. 56, no. 3, pp. 159-172, 2000.

R. Cremer, et al., “Comparative characterization of alumina coatings deposited by RF, DC and pulsed reactive magnetron sputtering,” Surface and Coatings Technology, vol. 120- 121, pp. 213-218, 1999.

J. Schulte and G. Sobe, “Magnetron sputtering of aluminium using oxygen or nitrogen as reactive gas,” Thin Solid Films, vol. 324, pp. 19-24, 1998.

P. J. Kelly, J. O’Brien, and R. D. Arnell, “The production of porous and chemically reactive coatings by magnetron sputtering,” Vaccum, vol. 74, pp. 1-10, 2004.

A. Schutze and D. T. Quinto, “Pulsed plasma-assisted PVD sputter deposited alumina thin films,” Surface and Coatings Technology, vol. 162, pp. 174-182, 2003.