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Title Development of Electrical Variable Capacitor Using Fast Recovery Diodes for Semiconductor Manufacturer System
Authors Cheong-Hyeon Hwang ; Hong-Min Kim ; Hee-Won Choi ; Yong-Sug Suh ; Cheon-Yong Lim
DOI https://doi.org/10.6113/TKPE.2024.29.6.503
Page pp.503-509
ISSN 1229-2214
Keywords Electrical Variable Capacitor (EVC); RF Plasma; Semiconductor Manufacturer System; Fast Recovery Diode