| Title |
A Study on the Optimal Design of 5 kW Plasma Discharger |
| Authors |
Hyun-Kyu Noh ; Chul-Jun Shin ; Jun-Young Lee |
| DOI |
10.6113/TKPE/2016.21.2.150 |
| Keywords |
High frequency inverter; Plasma discharger; Plasma power supply; Plasma reactor; Resonant inverter |
| Abstract |
This paper presents a study on the design optimization of a 5 kW plasma discharger for driving plasma reactor. The proposed study is composed of a high-frequency inverter based on the full-bridge circuit using soft switching techniques for high-frequency switching. The switching frequency in the operating region is the area of 130?200 kHz. By applying the LC resonance technique and a variable switching frequency, control technique is designed to be stable under changes in the load characteristics of the plasma reactor. This paper presents a quantitative analysis technique for design optimization. Experiments are performed according to load characteristic variations depending on the vacuum of the plasma reactor. This paper has verified the topology and design method for the 5 kW plasma discharger design. |