TKPE
The Transactions of
The Korean Institute of Power Electronics
KIPE
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ISSN : 1229-2214 (Print)
ISSN : 2288-6281 (Online)
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2026-06
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P.273
An Electrical Variable Capacitor Circuit for Fast Semiconductor Process
Hongmin Kim ; Heewon Choi ; Cheonghyeon Hwang ; Yongsug Suh ; Cheon-Yong Lim
https://doi.org/10.6113/TKPE.2026.31.3.273
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